Area-Selective Etching of Poly(methyl methacrylate) Films by

ZnO etching rate and selectivity of ZnO/PMMA as a function of chamber

Area-Selective ALD with Soft Lithographic Methods: Using Self-Assembled Monolayers to Direct Film Deposition

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

Nanomaterials, Free Full-Text

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

Selective directed self-assembly of coexisting morphologies using block copolymer blends

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

BNL, Research Partnerships and Technology Transfer

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

Color online) (a) Schematic representation of ion sputter etch yield

Area-Selective Deposition of Ruthenium by Combining Atomic Layer Deposition and Selective Etching

Coatings, Free Full-Text

Fluorine-containing polymeric inhibitor for highly selective and durable area-selective atomic layer deposition - ScienceDirect

Effect of SIS treatment on the etch resistance of PMMA and ZEP520A. (a)

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition